SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 13 February 2016)] MOEMS and Miniaturized Systems XV - MEMS-mirror based trajectory resolution and precision enabled by two different piezoresistive sensor technologies
Piyawattanametha, Wibool, Park, Yong-Hwa, Grahmann, Jan, Dreyhaupt, André, Drabe, Christian, Schrödter, Richard, Kamenz, Jörg, Sandner, ThiloVolume:
9760
Year:
2016
Language:
english
DOI:
10.1117/12.2212965
File:
PDF, 1.05 MB
english, 2016