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SPIE Proceedings [SPIE Lasers, Optics, and Vision for Productivity in Manufacturing I - Besancon, France (Monday 10 June 1996)] Micro-Optical Technologies for Measurement, Sensors, and Microsystems - High-resolution absolute position detection using a multiple grating
Schilling, Ulrich, Drabarek, Pawel, Kuehnle, Goetz, Tiziani, Hans J., Parriaux, Olivier M.Volume:
2783
Year:
1996
Language:
english
DOI:
10.1117/12.248492
File:
PDF, 341 KB
english, 1996