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SPIE Proceedings [SPIE Photonics China '96 - Beijing, China (Monday 4 November 1996)] Laser Processing of Materials and Industrial Applications - Production of intense atomic nitrogen beam used for doping and synthesis of nitride film by pulsed laser ablation
Xu, Ning, Du, Yuancheng, Ying, Zhifeng, Ren, Zhongmin, Li, Fuming, Deng, Shu-Sen, Wang, S. C.Volume:
2888
Year:
1996
Language:
english
DOI:
10.1117/12.253118
File:
PDF, 456 KB
english, 1996