SPIE Proceedings [SPIE Optoelectronics and High-Power Lasers & Applications - San Jose, CA (Saturday 24 January 1998)] Miniaturized Systems with Micro-Optics and Micromechanics III - MEMS-based microgratings: preliminary results of novel configurations
Castracane, James, Gutin, Mikhail A., Motamedi, M. Edward, Goering, RolfVolume:
3276
Year:
1998
Language:
english
DOI:
10.1117/12.302396
File:
PDF, 1.43 MB
english, 1998