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SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] Microelectronic Device Technology II - Production of ohmic contacts to AlxGa1-xAs of the n- and p-type conductivity with surface cleaning in atomic hydrogen

Vishnyakov, A. S., Kagadei, Valerii A., Kozhinova, N. I., Romas, L. M., Proskurovsky, Dmitry I., Burnett, David, Wristers, Dirk, Tsuchiya, Toshiaki
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Volume:
3506
Year:
1998
Language:
english
DOI:
10.1117/12.323987
File:
PDF, 1.21 MB
english, 1998
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