![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE International Symposium on Microelectronics and Assembly - Singapore, Singapore (Monday 27 November 2000)] Design, Modeling, and Simulation in Microelectronics - Design considerations in micromachined silicon microphones
Miao, Jianmin, Lin, Rongming, Chen, Longqing, Zou, Quanbo, Lim, Sin Y., Seah, Suan H., Courtois, Bernard, Demidenko, Serge N., Lau, Lee Y.Volume:
4228
Year:
2000
Language:
english
DOI:
10.1117/12.405427
File:
PDF, 100 KB
english, 2000