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SPIE Proceedings [SPIE Photomask Technology - Monterey, CA (Wednesday 13 September 2000)] 20th Annual BACUS Symposium on Photomask Technology - Development of a MoSi-based bilayer HT-PSM blank for ArF lithography
Kanai, Shuichiro, Kawada, Susumu, Isao, Akihiko, Sasaki, Takaei, Maetoko, Kazuyuki, Yoshioka, Nobuyuki, Grenon, Brian J., Dao, Giang T.Volume:
4186
Year:
2001
Language:
english
DOI:
10.1117/12.410767
File:
PDF, 302 KB
english, 2001