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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Reliability, Testing, and Characterization of MEMS/MOEMS - Experimental microfluidics toolbox for MEMS characterization
Wereley, Steve T., Meinhart, Carl D., Stone, Shannon, Hohreiter, Vince, Chung, Jacob, Ramesham, RajeshuniVolume:
4558
Year:
2001
Language:
english
DOI:
10.1117/12.443013
File:
PDF, 439 KB
english, 2001