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SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Design, Characterization, and Packaging for MEMS and Microelectronics II - Electrostatic interactions in micro-electro-mechanical resonant oscillators
Baskaran, Rajashree, Turner, Kimberly L., Franzon, Paul D., Malshe, Ajay P., Tay, Francis E.Volume:
4593
Year:
2001
Language:
english
DOI:
10.1117/12.448835
File:
PDF, 432 KB
english, 2001