SPIE Proceedings [SPIE Photomask 2001 - Monterey, CA (Wednesday 3 October 2001)] 21st Annual BACUS Symposium on Photomask Technology - Optimization of alternating phase shifting mask structure
Cha, Han-Sun, Choi, Se-Jong, Yoon, Si-Yeul, Jung, Sung-Mo, Choi, Sang-Soo, Jeong, Soo-Hong, Dao, Giang T., Grenon, Brian J.Volume:
4562
Year:
2002
Language:
english
DOI:
10.1117/12.458265
File:
PDF, 153 KB
english, 2002