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SPIE Proceedings [SPIE LAMP 2002: International Congress on Laser Advanced Materials Processing - Osaka, Japan (Monday 27 May 2002)] Third International Symposium on Laser Precision Microfabrication - Laser-based technology of scanning near-field optical probes fabrication: study of kinetics and progress of measuring
Veiko, Vadim P., Kalachev, Alexey I., Kaporsky, Lev N., Volkov, Sergey A., Voznesensky, Nikolay B., Miyamoto, Isamu, Kobayashi, Kojiro F., Sugioka, Koji, Poprawe, Reinhart, Helvajian, HenryVolume:
4830
Year:
2003
Language:
english
DOI:
10.1117/12.486565
File:
PDF, 805 KB
english, 2003