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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Micromachining Technology for Micro-Optics and Nano-Optics - Novel method of fabrication of diffractive microlens arrays
Chen, Sihai, Yi, Xinjian, Ma, Hong, Huang, Guang, Wang, Hongchen, Xiong, Tao, Li, Xiong, Li, Xiongwei, Johnson, Eric G.Volume:
4984
Year:
2003
Language:
english
DOI:
10.1117/12.501841
File:
PDF, 469 KB
english, 2003