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SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Recent Developments in Traceable Dimensional Measurements II - Improved shape measurement in optical profiler
Schmit, Joanna, Novak, Erik, Decker, Jennifer E., Brown, NicholasVolume:
5190
Year:
2003
Language:
english
DOI:
10.1117/12.506946
File:
PDF, 931 KB
english, 2003