SPIE Proceedings [SPIE Photomask Technology - Monterey, CA (Monday 8 September 2003)] 23rd Annual BACUS Symposium on Photomask Technology - Cell projection EB exposure for Giga DRAM device mask
Shin, Jae Cheon, Lim, Munki, Lee, Youngmo, Choi, Bo-Kyung, Choi, Yongkyoo, Han, Oscar, Kimmel, Kurt R., Staud, WolfgangVolume:
5256
Year:
2003
Language:
english
DOI:
10.1117/12.518332
File:
PDF, 481 KB
english, 2003