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SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 26 April 2004)] Optical Metrology in Production Engineering - Short coherence transmitted light interferometer for the thickness measurement of Si membranes
Breitmeier, Ulrich, Osten, Wolfgang, Takeda, Mitsuo, Leonhardt, KlausVolume:
5457
Year:
2004
Language:
english
DOI:
10.1117/12.544492
File:
PDF, 269 KB
english, 2004