![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Photonics Asia 2004 - Beijing, China (Monday 8 November 2004)] MEMS/MOEMS Technologies and Applications II - Analysis of the structures and characteristics for an InP-based micromechanical tunable filter
Chen, Bin, Zhou, Zhen, Huang, Yongqing, Ren, Xiaomin, Ma, Zhichun, Jin, Guofan, Chen, XuyuanVolume:
5641
Year:
2004
Language:
english
DOI:
10.1117/12.578453
File:
PDF, 499 KB
english, 2004