SPIE Proceedings [SPIE Smart Materials, Nano-, and...

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SPIE Proceedings [SPIE Smart Materials, Nano-, and Micro-Smart Systems - Sydney, Australia (Sunday 12 December 2004)] Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II - Surface acoustic wave based ozone sensor with an InOx/Si3N4/36° YX LiTaO3 structure

Fechete, Alexandru C., Ippolito, Samuel J., Kalantar-Zadeh, Kourosh, Wlodarski, Wojtek, Holland, Anthony S., Chiao, Jung-Chih, Jamieson, David N., Faraone, Lorenzo, Dzurak, Andrew S.
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Volume:
5650
Year:
2005
Language:
english
DOI:
10.1117/12.582076
File:
PDF, 68 KB
english, 2005
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