SPIE Proceedings [SPIE MOEMS-MEMS Micro &...

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SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] MOEMS and Miniaturized Systems V - A membrane mirror with transparent electrode for adaptive optics

Kurczynski, Peter L., El-Fatatry, Ayman, Dyson, Harold M., Sadoulet, Bernard, Bower, J. Eric, Lai, Warren Y., Mansfield, William M., Taylor, J. Ashley
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Volume:
5719
Year:
2005
Language:
english
DOI:
10.1117/12.593234
File:
PDF, 454 KB
english, 2005
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