SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] MOEMS and Miniaturized Systems V - A membrane mirror with transparent electrode for adaptive optics
Kurczynski, Peter L., El-Fatatry, Ayman, Dyson, Harold M., Sadoulet, Bernard, Bower, J. Eric, Lai, Warren Y., Mansfield, William M., Taylor, J. AshleyVolume:
5719
Year:
2005
Language:
english
DOI:
10.1117/12.593234
File:
PDF, 454 KB
english, 2005