SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Emerging Lithographic Technologies IX - EUV spectroscopy of mass-limited Sn-doped laser micro-plasmas
George, Simi, Mackay, R. Scott, Koay, Chiew-Seng, Takenoshita, Kazutoshi, Bernath, Robert, Al-Rabban, Moza, Keyser, Christian, Bakshi, Vivek, Scott, Howard, Richardson, MartinVolume:
5751
Year:
2005
Language:
english
DOI:
10.1117/12.596781
File:
PDF, 1.03 MB
english, 2005