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SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Design and Process Integration for Microelectronic Manufacturing III - Evaluating design for manufacturing with process capability analysis
van Wingerden, Johannes, Liebmann, Lars W., Le Cam, Laurent, Garg, Manish, Aksenov, Yuri, Dirksen, PeterVolume:
5756
Year:
2005
Language:
english
DOI:
10.1117/12.599648
File:
PDF, 782 KB
english, 2005