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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Comparative study on Al-doped ZnO films sputtered with ceramics and metal targets
Shao, Le-Xi, Liu, Xiao-Ping, Hwang, Huey-Liang, Chu, Junhao, Lai, Zongsheng, Wang, Lianwei, Xu, ShaohuiYear:
2012
Language:
english
DOI:
10.1117/12.607274
File:
PDF, 990 KB
english, 2012