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SPIE Proceedings [SPIE Photomask Technology 2005 - Monterey, California (Monday 3 October 2005)] 25th Annual BACUS Symposium on Photomask Technology - Enhanced resist and etch CD control by design perturbation
Gupta, Puneet, Weed, J. Tracy, Martin, Patrick M., Kahng, Andrew B., Park, Chul-HongVolume:
5992
Year:
2005
Language:
english
DOI:
10.1117/12.632753
File:
PDF, 278 KB
english, 2005