SPIE Proceedings [SPIE 2nd international Symposium on Advanced Optical Manufacturing and Testing Technologies - Xian, China (Wednesday 2 November 2005)] 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - AlN thin films prepared by DC arc deposition
Yang, Li, Liang, Hai-feng, Yan, Yi-xin, Wen, Shangming, Chen, Yaolong, Miao, Shu-fan, Kley, Ernst-BernhardVolume:
6149
Year:
2005
Language:
english
DOI:
10.1117/12.674289
File:
PDF, 297 KB
english, 2005