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SPIE Proceedings [SPIE 27th Annual BACUS Symposium on Photomask Technology - Monterey, CA (Monday 17 September 2007)] Photomask Technology 2007 - UV-NIL templates for the 22nm node and beyond
Hiraka, Takaaki, Naber, Robert J., Kawahira, Hiroichi, Yusa, Satoshi, Fujii, Akiko, Sasaki, Shiho, Itoh, Kimio, Toyama, Nobuhito, Kurihara, Masaaki, Mohri, Hiroshi, Hayashi, NaoyaVolume:
6730
Year:
2007
Language:
english
DOI:
10.1117/12.746655
File:
PDF, 1.03 MB
english, 2007