![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Photonics Asia 2007 - Beijing, China (Sunday 11 November 2007)] MEMS/MOEMS Technologies and Applications III - New developments on polymer-based MEMS phase shifters
Wang, Jianqun, Chiao, Jung-Chih, Chen, Xuyuan, Ativanichayaphong, Thermpon, Cai, Ying, Zhou, Zhaoying, Li, Xinxin, Huang, Wen-Ding, Chiao, Mu, Chiao, J.-C.Volume:
6836
Year:
2007
Language:
english
DOI:
10.1117/12.754991
File:
PDF, 397 KB
english, 2007