SPIE Proceedings [SPIE Photonics Asia 2007 - Beijing, China (Sunday 11 November 2007)] Holography and Diffractive Optics III - Reactive ion beam etching of multilayer diffraction gratings with SiO 2 as the top layer
Liu, Ying, Sheng, Yunlong, Hsu, Dahsiung, Xu, Xiangdong, Hong, Yilin, Yu, Chongxiu, Xu, Dequan, Fu, ShaojunVolume:
6832
Year:
2007
Language:
english
DOI:
10.1117/12.758011
File:
PDF, 783 KB
english, 2007