SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

  • Main
  • SPIE Proceedings [SPIE SPIE Advanced...

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Advances in Resist Materials and Processing Technology XXV - The effect of EUV molecular glass architecture on the bulk dispersion of a photo-acid generator

Henderson, Clifford L., VanderHart, David L., De Silva, Anuja, Felix, Nelson, Prabhu, Vivek M., Ober, Christopher K.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
6923
Year:
2008
Language:
english
DOI:
10.1117/12.773048
File:
PDF, 766 KB
english, 2008
Conversion to is in progress
Conversion to is failed