SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] Photonic Crystal Materials and Devices VIII - Impact of dry-etching induced damage in InP-based photonic crystals
Berrier, Audrey, De La Rue, Richard M., López, Ceferino, Shi, Yaocheng, Siegert, Jörg, Midrio, Michele, Viktorovitch, Pierre, Marcinkevicius, Saulius, He, Sailing, Anand, SrinivasanVolume:
6989
Year:
2008
Language:
english
DOI:
10.1117/12.781231
File:
PDF, 547 KB
english, 2008