SPIE Proceedings [SPIE SPIE Defense, Security, and Sensing - Orlando, Florida, USA (Monday 13 April 2009)] Micro- and Nanotechnology Sensors, Systems, and Applications - An iterative method for estimating the pull-in parameters of electrostatic actuators
Nelatury, Sudarshan R., George, Thomas, Islam, M. Saif, Onipede, Oladipo, Gray, Robert, Dutta, Achyut K.Volume:
7318
Year:
2009
Language:
english
DOI:
10.1117/12.819453
File:
PDF, 214 KB
english, 2009