SPIE Proceedings [SPIE SPIE Europe Optical Metrology -...

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SPIE Proceedings [SPIE SPIE Europe Optical Metrology - Munich, Germany (Monday 15 June 2009)] Modeling Aspects in Optical Metrology II - Assistance system for optical sensors

Schmitt, R., Bosse, Harald, Bodermann, Bernd, Koerfer, F., Seewig, J., Silver, Richard M., Osten, W., Weckenmann, A.
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Volume:
7390
Year:
2009
Language:
english
DOI:
10.1117/12.827339
File:
PDF, 1006 KB
english, 2009
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