SPIE Proceedings [SPIE SPIE Defense, Security, and Sensing - Orlando, Florida, United States (Monday 25 April 2011)] Micro- and Nanotechnology Sensors, Systems, and Applications III - Finite element modelling and simulation of thermo-elastical damping of MEMS vibrations
Kausinis, Saulius, Yee, Karl, Barauskas, RimantasVolume:
8031
Year:
2011
Language:
english
DOI:
10.1117/12.882784
File:
PDF, 552 KB
english, 2011