SPIE Proceedings [SPIE International Symposium on Photoelectronic Detection and Imaging 2011 - Beijing, China (Tuesday 24 May 2011)] International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies - Design and optimization of a clamping mechanism for piezoelectric inchworm actuator
Wang, Geng, Wang, Yuelin, Xie, Huikai, Guan, Chunlin, Zhang, Xiaojun, Jin, Yufeng, Rao, ChanghuiVolume:
8191
Year:
2011
Language:
english
DOI:
10.1117/12.901634
File:
PDF, 1.14 MB
english, 2011