SPIE Proceedings [SPIE 1988 Intl Congress on Optical Science and Engineering - Hamburg, Germany (Monday 19 September 1988)] Thin Film Technologies III - Effect Of Process Gas Mixture On Reactively DC Magnetron Sputtered (Al1_xSix)OyNz Thin Films
Bjornard, Erik, Guenther, Karl H., Pulker, Hans K.Volume:
1019
Year:
1989
Language:
english
DOI:
10.1117/12.950013
File:
PDF, 330 KB
english, 1989