SPIE Proceedings [SPIE Soft X-Rays Optics and Technology - Berlin, Germany (Tuesday 8 December 1987)] Soft X-Ray Optics and Technology - Electron beam lithography and nanometer structures-fabrication of microzone plates
Bogli, V., Unger, P., Beneking, H., Koch, E., Schmahl, Guenther A.Volume:
733
Year:
1986
Language:
english
DOI:
10.1117/12.964945
File:
PDF, 15.84 MB
english, 1986