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Surface Acoustic Wave Sensors of Delay Lines Based on MEMS
Haofeng, Li, Rui, Jia, Weilong, Li, Chen, Chen, Xinyu, LiuVolume:
10
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2010.2817
Date:
November, 2010
File:
PDF, 528 KB
english, 2010