X-ray characterization of high quality AlN epitaxial...

physica status solidi (c) 2003 Vol. 0 ; Iss. 7

X-ray characterization of high quality AlN epitaxial layers: effect of growth condition on layer structural properties

Q. S. Paduano, A. J. Drehman, D. W. Weyburne, J. Kozlowski, J. Serafinczuk, J. Jasinski, Z. Liliental-Weber
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Year:
2003
Language:
english
Pages:
5
DOI:
10.1002/pssc.200303251
File:
PDF, 119 KB
english, 2003
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