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Smart CutTM SiCOI wafers for MBE GaN epitaxy
F. Letertre, J. Brault, I. Matko, F. Enjalbert, E. Bellet-Amalric, G. Feuillet, C. Richtarch, B. Faure, L. DiCioccio, R. Madar, B. Daudin, E. MonroyYear:
2003
Language:
english
Pages:
4
DOI:
10.1002/pssc.200303306
File:
PDF, 143 KB
english, 2003