Impact of SiC surface control on initial growth mode and crystalline quality of AlN grown by molecular-beam epitaxy
N. Onojima, J. Suda, T. Kimoto, H. MatsunamiYear:
2003
Language:
english
Pages:
4
DOI:
10.1002/pssc.200303358
File:
PDF, 85 KB
english, 2003