Hydride vapor phase epitaxy of AlN: thermodynamic analysis of aluminum source and its application to growth
Y. Kumagai, T. Yamane, T. Miyaji, H. Murakami, Y. Kangawa, A. KoukituYear:
2003
Language:
english
Pages:
4
DOI:
10.1002/pssc.200303360
File:
PDF, 120 KB
english, 2003