The role of the growth temperature for the SiN interlayer deposition in GaN
Tim Böttcher, Jens Dennemarck, Roland Kröger, Stephan Figge, Detlef HommelYear:
2003
Language:
english
Pages:
4
DOI:
10.1002/pssc.200303370
File:
PDF, 114 KB
english, 2003