Growth and characterization of reactive sputtered AlInN films
Qixin Guo, Kousuke Yahata, Tooru Tanaka, Mitsuhiro Nishio, Hiroshi OgawaYear:
2003
Language:
english
Pages:
4
DOI:
10.1002/pssc.200303378
File:
PDF, 56 KB
english, 2003