Reduction of oxygen contamination in AlN
J. Salzman, S. Prawer, B. Meyler, Y. Golan, M. Shandalov, R. Sauer, N. TeofilovYear:
2003
Language:
english
Pages:
4
DOI:
10.1002/pssc.200303387
File:
PDF, 131 KB
english, 2003