Growth of high-quality non-polar AlN on 4H-SiC(11–20) substrate by molecular-beam epitaxy
N. Onojima, J. Suda, T. Kimoto, H. MatsunamiYear:
2003
Language:
english
Pages:
4
DOI:
10.1002/pssc.200303396
File:
PDF, 150 KB
english, 2003