Growth of 100-mm-diameter AlGaN/GaN heterostructures on...

Growth of 100-mm-diameter AlGaN/GaN heterostructures on sapphire substrates by MOVPE

M. Miyoshi, H. Ishikawa, T. Egawa, T. Jimbo
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Year:
2003
Language:
english
Pages:
4
DOI:
10.1002/pssc.200303445
File:
PDF, 68 KB
english, 2003
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