Chemical mechanical polishing for decoration and...

physica status solidi (c) 2003 Vol. 0 ; Iss. 7

Chemical mechanical polishing for decoration and measurement of dislocations on freestanding GaN wafers

Xueping Xu, Robert P. Vaudo, George R. Brandes, Jie Bai, Pelagia Irene Gouma, Michael Dudley
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Year:
2003
Language:
english
Pages:
4
DOI:
10.1002/pssc.200303501
File:
PDF, 113 KB
english, 2003
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