Reduction in crystallographic tilt of lateral epitaxial overgrown GaN by using new patterned shape mask
G. Feng, X. M. Shen, J. J. Zhu, B. S. Zhang, H. Yang, J. W. LiangYear:
2003
Language:
english
Pages:
4
DOI:
10.1002/pssc.200303539
File:
PDF, 93 KB
english, 2003