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Mitigation of residual oscillations in electrostatically actuated microbeams using a command-shaping approach
Godara, R K, Joglekar, M MVolume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/11/115028
Date:
November, 2015
File:
PDF, 2.20 MB
english, 2015