Chemical vapor deposition of zinc oxide thin films on Y2O3/Si substrates
Chih-Wei Lin, Tsan-Yao Cheng, Li Chang, Jenh-Yih JuangVolume:
1
Year:
2004
Language:
english
Pages:
5
DOI:
10.1002/pssc.200304133
File:
PDF, 424 KB
english, 2004