Comparison of SiOx structure in RF sputtered samples
H. C. Swart, E. D. van Hattum, W. M. Arnoldbik, F. H. P. M. HabrakenVolume:
1
Year:
2004
Language:
english
Pages:
6
DOI:
10.1002/pssc.200404811
File:
PDF, 174 KB
english, 2004