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[IEEE 2015 IEEE International Conference on Automation Science and Engineering (CASE) - Gothenburg, Sweden (2015.8.24-2015.8.28)] 2015 IEEE International Conference on Automation Science and Engineering (CASE) - Petri net modeling and one-wafer scheduling of single-arm tree-like multi-cluster tools
Zhu, QingHua, Qiao, Yan, Zhou, MengChuYear:
2015
Language:
english
DOI:
10.1109/coase.2015.7294094
File:
PDF, 2.68 MB
english, 2015